Vacuum Pumping System
Oil Rotary Pump : E1M175
Mechanical Booster Pump : EH500
High Vacuum Pump£ºOil Diffusion Pump12000L/sec
(Option: Cryo-pumps or Turbo Molecular Pumps)
Vacuum Valves System
Type: 4¡±, 22¡±
Chamber Heating System
Max Temperature: o to 400¡É
Type: Halogen Lamp
(Option: Micro-sheathe Heater)
Substrate Holder Type:
Dome or planetary
Rotation Speed:0 to 30rpm
soft start, soft stop and speed can be changed
Electronic control system:
Type: Panel PC
modify and change any desired control
full control the coater to meet and perform the ultimate
desired final products
technical information is available
Vacuum Measurement System:
High vacuum sensor:2
Low vacuum sensor:1
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